The XCDA is safe and more effective than other gases employed in the wafer production.
The newly designed AGPS 2HZ2 provides the smallest footprint available in high-flow system, conserving a valuable real estate within the subfab area while decreasing the gas and power consumption. The 2HZ2’s design uses proven purification technology, including three purifier beds, two of which are working in parallel to preserve a reliable stream of purge gas, while the third bed is either regenerating or in the stand-by mode. This environmentally friendly, purification process occurs automatically at the ambient temperatures decreasing energy needs, while the purifier media is also automatically regenerated and is restored to its original capacity.
Entegris has raised the bar in high-flow systems with the AGPS 2HZ2, states Chris Vroman, marketing director for Entegris Gas Microcontamination Control Business Unit. With double the flow rate capacity and an average floor space savings of 60 percent over comparable units, the AGPS 2HZ2 is a market first. Based on proven XCDA purification technology, the introduction of the AGPS represents Entegris’ commitment to evolve in line with our customers needs to meet the most stringent high-flow purification and contamination control needs in sub-45 nm manufacturing.
The AGPS 2HZ2, used as part of the company’s Clarilite Certified solution facilitates product quality by offering XCDA purge gas to scanner platforms, reticle stocker environment, and the reticle pods, offering a continuous cleansing environment in and around the reticle that helps prevent the formation of haze. This enables for a four-to-five-fold reduction in the reticle cleanings, a benefit that dramatically enhances output and decreases reticle replacement, and ultimately overall wafer costs.
With the introduction of the 20K system, the company provides a wide range of purification systems from 100 to 20,000 slpm. Each combines increased protection against the reticle haze with the advanced contamination control technology that offers the high outlet purity, measured in sub part-per-trillion levels, and lowest cost of operation.
