This innovation clearly represents Entegris’ leadership in materials science, stated Walter Plante, marketing director for Entegris’ Liquid Microcontamination Control Business Unit. Our new nylon filter overcomes what had previously been a technological limitation — optimized flow and retention without the risk of defectivity or reduced throughput resulting from increased pressure drop. This offers significant benefits to our semiconductor customers who want to assure the purity of their process and quality of the final product. It also further delivers on Entegris’ commitment to provide leading-edge membrane and filtration technologies for enhanced contamination control.
The new nylon membrane is available in Impact point-of-use filter and the Microgard product for the bulk applications. The new membrane expands company’ solution set for a broad range of chemistries and applications. With the new combination of its two-stage IntelliGen Mini pump and the advanced filtration products, the company offers the industry with standard-setting performance in delivery and filtration of photochemicals and coatings in the 45-nanometer and below processes.
