The new cabling kits are based on a new design that speeds and simplifies process of making DC current-voltage (I-V), capacitance-voltage (C-V), and pulsed I-V testing connections from any new semiconductor parameter analyzer to a Cascade Microtech or SUSS MicroTec prober.
The design of new high performance triaxial cable kits makes them perfect for those whose characterization needs demand frequent switching between measurement types. These new cable kits eliminate the need for recabling when switching between measurement types, also eliminating the measurement errors that often result from cabling errors. Two versions of the cable kit are available—one optimized for use with Cascade Microtech probers and the other for use with SUSS MicroTec probers.
Characterizing semiconductor devices electrically and understanding processes utilized in their production demands a wide array of the measurements, incorporating DC I-V, C-V, and pulsed I-V measurements. One of the most important challenges related with combining these measurement types in single characterization system is that each one has fundamentally different cabling needs. For example, making low current I-V measurements demands guarding, so triaxial cables are needed. C-V measurements are usually made using four coaxial cables with their outer shells connected together to control the characteristic impedance the signals encounter. The pulsed measurements need high bandwidth of the three measurement types, so the characteristic impedance of cabling must match the source impedance to prevent reflections from the DUT from reflecting off the source.
Keithley’s cabling kits are designed with these differing needs in mind. No matter what type of measurement is being made, no changes to probe manipulator cabling are needed; the cables can simply be moved from one set of instrument connections to another that makes it much easier to switch between I-V measurements, C-V measurements, and pulsed I-V testing, simplifying the device characterization process. Additionally, the setup changes can be made while the probe needles are in contact with a wafer, decreasing pad damage and maintaining the same contact impedance for all three types of measurements.
Ongoing System Enhancements Ensure Continuing Productivity:
Keithley’s Model 4200-SCS replaces various electrical test tools with single, tightly integrated characterization solution and is perfect for various applications incorporating semiconductor technology development, process development, and materials research in reliability labs, materials and device research labs and consortia, and also any lab requiring a benchtop DC or pulse instrument. The company has continually improved the Model 4200-SCS’s hardware and software ever since it launched. This commitment to the ongoing system innovation assures a cost-effective upgrade path, so users don’t have to buy a new parametric analyzer because their old one is obsolete. The systems can be upgraded cost-effectively to keep up with the evolving test needs, so capital investments in the Model 4200-SCS stretch much further than with competitive test solutions.
Price and Availability:
Two versions of the cable kit are now available, the Model 4210-MMPC-C for Cascade Microtech probers and the Model 4210-MMPC-S for use with SUSS MicroTec probers, each priced at $995.
Keithley is a US-based manufacturer of electronic instruments and systems.
