The National Center for Scientific Research (NCSR Demokritos) has installed an EBPG5000plusES system at the Institute of Microelectronics.
The company said Vistec EBPG5000plusES is a high-performance lithography tool based on reliable and well-proven system architecture.
Due to its electron-optical column, the system can expose various substrate types, and it provides a spot size down to <2.2nm, which allows the routinely generation of nano-dimensional features below 8nm.
The system incorporates an interactive graphical user interface that provides ease of use for diverse multi user environments.
Vistec Lithography general manager Rainer Schmid said that the EBPG5000plusES will be the first 100kV system in Greece, and will not only enable the institute to maintain its leading role in national nano-research but also to participate in European research projects, networks of excellence, and technology platforms at the highest level.
