MaxBright leverages Veeco’s Uniform FlowFlange technology and automation expertise by combining multiple, new, high-throughput MOCVD reactors in a modular two- or four-reactor cluster architecture, the company said.
The MaxBright reactors, based on the production-proven K465i, feature both expanded wafer capacity and advanced, proprietary, closed-loop, thermal control technology.
Veeco Compound Semiconductor Business executive vice president William Miller said that the architecture enables single chamber or multi-chamber layer growth capability, increasing process flexibility for demanding LED structures.
"MaxBright’s compact architecture also enables a footprint efficiency gain of up to 2.5 times standalone MOCVD systems, and overall, MaxBright delivers a 500% productivity gain compared to the K465i in a flexible and compact package," Miller said.
Veeco CEO John Peeler said that the company has accelerated its MOCVD technology investment and new product development programs to further reduce LED manufacturing costs, and MaxBright will enable the industry to accelerate its transition to LED lighting.
