The Semiconductor Equipment and Materials International (SEMI) and International Technology Roadmap for Semiconductors (ITRS) to introduce a roadmap to reduce energy consumption, or increase moderate tools, processes and equipment to produce semiconductor components. The roadmap is expected to be introduced in late 2009 or early 2010. The roadmap is likely to highlight the improvement areas in energy conservation and identify the way to achieve those results.

SEMI is introducing an initiative to recognize the drivers, barriers, and opportunities for improving energy conservation and is collaborating with the International Sematech Manufacturing Initiative ISMI, the WSC energy conservation working group of the World Semiconductor Council (WSC) and the environmental health and safety working group of the ITRS.

The targets are to include are energy reduction of mature (200-mm) equipment; energy conservation objectives for 450-mm equipment; idle mode; component energy ratings; exhaust reduction; heat dissipation; right-sizing support systems; equipment efficiency and power management efficiencies; fab energy simulation tools.