Celerity, Inc. (Celerity) has launched new GF100 series mass flow controller (MFC). It has been designed to accurately measure, monitor and control ultra high purity process gas chemistry in semiconductor device and solar cell manufacturing processes. The new MFC is a highly configurable platform featuring company’s second generation proprietary pressure transient insensitive flow technology.

The insensitive flow technology enhances process control, decreases cost, and eliminates difficulty of inventory management.

The GF100 series MFC features high accuracy, reproducible gas measurement, control from advanced digital architecture, in situ electronic reconfiguration of gas and flow range for maximum process flexibility and optimization, pressure transient insensitive flow technology design and intelligent embedded diagnostics, service port and software for simple and well-organized on-tool maintenance.

Celerity is a market leader in advanced digital ultra high purity mass flow controllers and an industry pioneer in pressure transient insensitive MFCs. By leveraging our extensive experience in gas flow control, the GF100 series is a continuous improvement update (CIP) of our market leading precision mass flow controllers, providing customers with a seamless RoHS compliant upgrade for enhanced process control and lower cost of ownership, said David Somo, senior vice president of sales and marketing of Celerity.